Silicon Wafer & Membrane Thickness Measurement

Filmetrics® offers tabletop, mapping, and production systems for wafer thickness measurement and membrane thickness measurement.
Wafer materials commonly measured include single polished or double polished Si (Silicon), Sapphire, Fused Silica, SiC, Li TaO3, GaN, and Glass.

Contact our thin-film measurement experts to discuss your Silicon Wafers and Membrane application.

Filmetrics offers free trial measurements - results are typically available in 1-2 days

Thickness Range* Application Product Line
5µm - 2mm Single Spot F3-sX
1nm - 200µm Single Spot F20
3nm - 2mm Thickness Mapping F50/F60-t/F60-c
*Range depends on model, options, and the material being measured