Microfluidics

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Silicon Mask for Microchannel Fabrication

Microfluidics deals with the management of fluids confined to sub-millimeter microchannel dimensions. Due to these small dimensions, mass transport is dominated by capillary forces. Thus the physics and chemistry encountered is more ideal and easily predicted. Metering of various components can also be precisely controlled. One could view this field as “a solution in search of a problem” except that several problems have already been solved:

Lab-on-a-chip
Chemical synthesis at the mesoscale
Precise production of complex microparticles
Living cell manipulation including optical tweezers

Our Profilm3D^® optical profilometer can easily measure microchannel dimensions from small to large, shallow to deep. Check out these images! ProfilmOnline^®

Contact our profiler experts to discuss your application.

Filmetrics^® offers free trial measurements - results are typically available in 1-2 days.

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Amorphous & Polysilicon
Measure thickness, crystallinity, and n and k of all forms of amorphous and polycrystalline silicon.
Dielectric Films
Filmetrics stocks instruments that measure the thousands of dielectric films used throughout industry.

CVD, dielectrics, barrier, PECVD, passivation, insulator, protection, Al2O3, CoO, ZnO, MoO, TiO2, Cr2O3, Nb2O5
Hardcoat Thickness
Filmetrics systems are used widely in the automotive industry to verify hardcoat and primer thickness.

Acrylic, Automotive industry, Chemical resistance, Clear coating, Decorative coating, Hardcoat, Eyewear, Face shield, Hardcoat, Hardness, Interpenetration Layer, Marring, Ophthalmic lens, Optical quality, Plastic lens, Polycarbonate, Polyester, Siloxane, Primer, Protective film, Scratch resistant, Screen protection, Surface finish, Surface protection, Thermal cure, Top coating, Touch screen, UV coating, UV cure
IC Failure Analysis
The F3-sX is used throughout the chip making industry to measure backside thinning of silicon.

Failure Analysis, FA, Silicon, Si, Integrated circuit, IC, Polishing, Backside failure analysis, Silicon thinning
ITO & Other TCOs
Proprietary analysis algorithms allow one-click measurement of TCO thickness, index, and k.

Indium tin oxide, ITO, tin-doped indium oxide, Transparent conductive oxide, TCO, Display, Front contact, Transparent Electrode, LED, LCD, Solar, Fluorine-doped tin oxide, FTO, TEC, TEC glass, Aluminum zinc oxide, AZO, Aluminum-doped zinc oxide, Zinc oxide, iZO, Indium zinc oxide, IZO, zinc-doped indium oxide
Medical Devices
Measure thickness of angioplasty balloons, stent and implant coatings, and many others.

Stents, drug-coated stents, Drug-coating, Balloons, Angioplasty, Parylene, Microfluidic device, Air gap, Catheter, Membranes
Metal Thickness
Measure thickness, index, and k of metal films up to 50nm, or thickness, sheet resistance, and resistivity of conductive films and samples

Metallized, Metallization, Foils, Stents, Mirrors, Steel, Stainless Steel, Gold, Nickel, Aluminium, Silver, Cobalt, Zinc, Molybdenum, Titanium, Chrome, Chromium, Niobium, Tungsten, Gallium, Germanium
Microfluidics
3-dimensional surface profile measurements to measure microfluidic channels.

microfluidics, lab on a chip, medical, synthesis, biomedical
OLEDs
Measure thickness and index of NPB, AlQ3, PEDOT, P3HT, soluble Teflons, etc…

PLED, AMOLED, Hole Transport (HT), Hole Injection Layer (HIL), Host Materials, anode, cathode, Alq3, NPB, phenylene vinylene, carbazole, thiophene, aniline, styrenesulfonate, phthalocyanine, naphthalene, fluorene, lithium, silver, ITO, calcium
Ophthalmic Coatings
Use the F10-AR to measure reflectance and color, as well as AR and hardcoat layer thicknesses.

eyeglasses, HC, hardcoat, scratch resistant, AR, anti-reflection, reflectance, UV curable, hydrophillic, polycarbonate, high index, CR39, MR-6, MR-7, Trivex
Optical Coatings & Filters
Filmetrics powerful measurement algorithms can easily measure multilayer dielectric film stacks.

optical, coatings, multi layer, multilayer, dielectric, stack, glass, band-pass, F10-RT, filter, transmittance
Parylene Coatings
Simply set your parylene-coated sample on the stage of the F3-CS to measure its thickness!

Conformal
Photoresist
We’ve measured dozens of different resists, and can generate index files for any resist you use.

SU-8, resist, Photoresist, PR, AZ, AZP, ZEP, positive, negative, g-line, i-line, KrF, PMMA, FEP, GRX, KMPR
Porous Silicon
Measure thickness, porosity, refractive index, and k of your porous silicon films.
Process Films
Filmetrics offers a full range of products for measuring semiconductor process films.
Refractive Index & k
Measure refractive index and extinction coefficient over wavelengths as wide as 190-1700nm.

n & k, complex, real, imaginary, refractive index, absorption, extinction coefficient, indices, Kramers-Kronig, optical dispersion, dielectric, Lorentz, Cauchy, photoresist, anomalous dispersion, path length
Silicon Wafers & Membranes
We offer tabletop, mapping, and production systems for measuring silicon up to 2mm thick.
Solar Applications
Measure CdTe, CdS, CIGS, amorphous-Si, TCOs, anti-reflection (AR) layers, and more...

Copper indium gallium diselenide, CIGS, Cadmium telluride, CdTe, Cad tel, Amorphous silicon, Amorphous Si, a-Si, Cadmium sulfide, CdS, window layer, buffer layer, Thin-film photovoltaic, Thin-film PV, TFPV, photovoltaics, Solar, Solar cells, Inline, In-situ, Roll-to-roll, R2R, Evaporation, Sputtering, CVD, MOCVD, PECVD, Transparent conductive oxide, TCO, Indium tin oxide, ITO, tin-doped indium oxide
Semiconductor Teaching Labs
More than fifty Filmetrics F20s have been delivered for use in university teaching labs.
Surface Roughness & Finish
3-dimensional surface profile measurements to measure surface roughness.

surface, roughness, optical profile, profilometer, finish, roughness measurement, polish, lapping, metal, scan
Web Coatings
Filmetrics systems are widely used in the polymer-films community to measure thickness in-line.

Roll to roll, Roll measurements, Roll systems, Rolling substrate, Roll fed, Roll web, Reel to reel , R2R, Web coater, Autoweb, In-line, In-line monitor, Online thickness, Line monitoring system, Precision measuring tools, Automatic, Feeding, Production, Multipoint, High speed