Thin-Film Metrology Video Tutorials

Thin Films and You

00:01:49
Join Mr. Skwerly as he learns about the importance of thin films to everyday life.

Measuring Thin Films: How Bubbles Get Their Color

00:02:32
This short film uses the colors of a bubble to illustrate how film thickness measurements are made using spectral reflectance.

How to Measure a Step Height with the Profilm3D

00:01:16
See how fast and easy it is to measure a step height.

Profilm3D Software and Measurement Tutorial

00:03:34
This video contains an overview of the various software analysis functions of the Profilm3D.

How to Set Up a Filmetrics F20

00:00:33
See how easy it is to set up a Filmetrics F20.

How to Measure with a Filmetrics F20

00:00:42
See how easy it is to use a Filmetrics F20.

How to Change the Lamp on a Filmetrics F20

00:00:54
See how easy it is to use a Filmetrics F20.

Webinars

Our webinars are hosted on KLA iUniversity

Thin Film Measurements (Part 1)

00:33:53
Film property measurements using optical techniques. Part 1: absolute reflectance

Thin Film Measurements (Part 2)

00:34:04
Film property measurements using optical techniques. Part 2: thin-film measurements

Extracting Thin Film Properties

00:28:55
Extracting thin film properties using optical metrology

Thin Film Measurements (Part 3)

00:30:50
Covering wavelength selection, film thickness range, goodness of fit

Thin Film Measurements (Part 4)

00:38:32
The Fast Fourier Transform: your friend for thick films

Survey of Resistance Measurements

001:01:25
Survey of methodologies for resistance measurements

Reflectance and Transmittance

00:26:38
Reflectance and transmittance: two are better than one

Profilm3D: Measuring Step Heights

00:32:08
Sample preparation, data acquisition, and calculation methods

Recipe Development on the F54-XY-200

00:54:49
F54-XY-200 hardware and software overview, pattern-recognition recipe development

Thin Film Measurements (Part 5)

00:34:22
Managing thickness nonuniformity

Thin Film Metrology: Optical Constants

00:37:15
Strategies and guidelines for determining and using optical constants for accurate measurement of film thickness.

Metal Film Resistance Monitoring

00:57:02
Using the R50 measurement system to provide critical data for monitoring metal films.

Spectral Reflectance with the F40 Microscope

00:35:11
Using the F40 microscope-based measurement system

Profilm3D Optical Techniques

00:42:42
Discussion on the various optical metrology techniques available on the Filmetrics Profilm3D optical profilometer

Lateral Resolution of Sheet Resistance Measurements

00:30:30
Discussion of the importance of spot size and 4PP pin spacing to edge exclusion and lateral resolution

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