Resistance Measurement

Filmetrics and KLA are working to merge our core technologies. KLA has been measuring sheet resistance and related electrical properties using both contact methods and non-contact methods for over 30 years. Filmetrics has over 20 years of transparent film measurement experience. Now we are combining our two core capabilities to extend the Filmetrics’ product lines to measure metal film characteristics.

Measuring conductive thin films on:

  • Wafer substrates
  • Glass substrates
  • Plastic (flexible) substrates
  • PCB patterned features
  • Solar Cells
  • Flat Panel Display metal features
  • Compound semiconductor substrates
  • Metal foils

Above: Correlation between 4-point probe (contact) and eddy current probe (non-contact)

Models - Coming Soon

Model Description
P3D-Rs20 Manual single point measurement small sample stage with contact and non-contact probes
P3D-Rs50 Mapping motorized measurement 200mm stage with contact and non-contact probes
P3D-Rs60 Production Mapping motorized measurement 200mm stage with contact and non-contact probes

Typical Applications

A wide range of measurements are being supported, including but not limited to the following:

  • Metal film thickness
  • Substrate thickness
  • Sheet Resistance
  • Resistivity
  • Conductivity
  • Stacked films