The F3-sX family measures semiconductor and dielectric layers up to 3 mm thick. Such thick layers tend to be rougher and less uniform than thinner layers, which the F3-sX counters with a 10-µm-diameter measurement spot. With it the F3-sX family easily measures materials that are impossible to measure with other instruments. Measurement rates of up to 1 kHz also make the F3-sX a top choice for many in-line applications (e.g. roll-to-roll processes).
|Model||Thickness Range*||Wavelength Range|
|F3-s980||10µm - 1mm||960-1000nm|
|F3-s1310||15µm - 2mm||1280-1340nm|
|F3-s1550||25µm - 3mm||1520-1580nm|
|*film stack dependent|