Integrated Circuit Failure Analysis
Failure Analysis (FA) techniques are used to locate and identify the cause of failure in integrated circuits.Application Note Request
The two main types of FA applications that require film thickness measurement are front side delayering (for traditional device-side up circuit packaging) and backside thinning (for the newer flip-chip device-side down circuit packaging.)
Front Side Delayering
The front side delayering process requires knowledge of the thickness of the dielectric remaining after dielectric thinning. The Filmetrics F40 is ideal for this application.
Backside FA requires removing most of the Si die thickness before the circuitry can be imaged and knowing the thickness of the remaining Si after each thinning step is critical. The Filmetrics F3-sX system was designed specifically to take on the challenge of measuring the thickness of rough Si layers resulting from various backside thinning processes. Thicknesses from 5µm to 1000µm are easily measured and an option is available the extend the minimum thickness down to under 0.1µm. Both single spot and mapping versions are available.
To discuss your semiconductor failure analysis application, contact our thin-film experts.
Filmetrics offers free trial measurements - results are typically available in 1-2 days.
Thickness Measurement Example
Here we use our F3-s1550 system to measure the thickness of remaining Si on an integrated circuit after backside thinning. The F3-s1550 utilizes special optics which produces a spot size less than 10μm in diameter, allowing for the measurement of polished as well as rough and non-uniform layers.
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Amorphous & Polysilicon
Measure thickness, crystallinity, and n and k of all forms of amorphous and polycrystalline silicon.
Our F80 Thickness Imaging products are used to measure oxide, STI, and metal CMP processes.
Filmetrics stocks instruments that measure the thousands of dielectric films used throughout industry.
CVD, dielectrics, barrier, PECVD, passivation, insulator, protection, Al2O3, CoO, ZnO, MoO, TiO2, Cr2O3, Nb2O5
Filmetrics systems are used widely in the automotive industry to verify hardcoat and primer thickness.
Acrylic, Automotive industry, Chemical resistance, Clear coating, Decorative coating, Hardcoat, Eyewear, Face shield, Hardcoat, Hardness, Interpenetration Layer, Marring, Ophthalmic lens, Optical quality, Plastic lens, Polycarbonate, Polyester, Siloxane, Primer, Protective film, Scratch resistant, Screen protection, Surface finish, Surface protection, Thermal cure, Top coating, Touch screen, UV coating, UV cure
IC Failure Analysis
The F3-sX is used throughout the chip making industry to measure backside thinning of silicon.
Failure Analysis, FA, Silicon, Si, Integrated circuit, IC, Polishing, Backside failure analysis, Silicon thinning
ITO & Other TCOs
Proprietary analysis algorithms allow one-click measurement of TCO thickness, index, and k.
Indium tin oxide, ITO, tin-doped indium oxide, Transparent conductive oxide, TCO, Display, Front contact, Transparent Electrode, LED, LCD, Solar, Fluorine-doped tin oxide, FTO, TEC, TEC glass, Aluminum zinc oxide, AZO, Aluminum-doped zinc oxide, Zinc oxide, iZO, Indium zinc oxide, IZO, zinc-doped indium oxide
Measure thickness of angioplasty balloons, stent and implant coatings, and many others.
Stents, drug-coated stents, Drug-coating, Balloons, Angioplasty, Parylene, Microfluidic device, Air gap, Catheter, Membranes
Measure thickness, index, and k of metal films up to 50nm thick.
Metallized, Metallization, Foils, Stents, Mirrors, Steel, Stainless Steel, Gold, Nickel, Aluminium, Silver, Cobalt, Zinc, Molybdenum, Titanium, Chrome, Chromium, Niobium, Tungsten, Gallium, Germanium
Measure thickness and index of NPB, AlQ3, PEDOT, P3HT, soluble Teflons, etc…
PLED, AMOLED, Hole Transport (HT), Hole Injection Layer (HIL), Host Materials, anode, cathode, Alq3, NPB, phenylene vinylene, carbazole, thiophene, aniline, styrenesulfonate, phthalocyanine, naphthalene, fluorene, lithium, silver, ITO, calcium
Use the F10-AR to measure reflectance and color, as well as AR and hardcoat layer thicknesses.
eyeglasses, HC, hardcoat, scratch resistant, AR, anti-reflection, reflectance, UV curable, hydrophillic, polycarbonate, high index, CR39, MR-6, MR-7, Trivex
Simply set your parylene-coated sample on the stage of the F3-CS to measure its thickness!
We’ve measured dozens of different resists, and can generate index files for any resist you use.
SU-8, resist, Photoresist, PR, AZ, AZP, ZEP, positive, negative, g-line, i-line, KrF, PMMA, FEP, GRX, KMPR
Measure thickness, porosity, refractive index, and k of your porous silicon films.
Filmetrics offers a full range of products for measuring semiconductor process films.
Refractive Index & k
Measure refractive index and extinction coefficient over wavelengths as wide as 190-1700nm.
n & k, complex, real , imaginary, refractive index, absorption, extinction coefficient, indices, Kramers-Kronig, optical dispersion, dielectric, Lorentz, Cauchy, photoresist, anomalous dispersion, path length
Silicon Wafers & Membranes
We offer tabletop, mapping, and production systems for measuring silicon up to 2mm thick.
Measure CdTe, CdS, CIGS, amorphous-Si, TCOs, anti-reflection (AR) layers, and more...
Copper indium gallium diselenide, CIGS, Cadmium telluride, CdTe, Cad tel,, Amorphous silicon, Amorphous Si, a-Si, Cadmium sulfide, CdS, window layer, buffer layer, Thin-film photovoltaic, Thin-film PV, TFPV, photovoltaics, Solar, Solar cells, Inline, In-situ, Roll-to-roll, R2R, Evaporation, Sputtering, CVD, MOCVD, PECVD, Transparent conductive oxide, TCO, Indium tin oxide, ITO, tin-doped indium oxide
Semiconductor Teaching Labs
More than fifty Filmetrics F20s have been delivered for use in university teaching labs.
Surface Roughness & Finish
3-dimensional surface profile measurements to characterize surface roughness.
Filmetrics systems are widely used in the polymer-films community to measure thickness in-line.
Roll to roll, Roll measurements, Roll systems, Rolling substrate, Roll fed, Roll web, Reel to reel , R2R, Web coater, Autoweb, In-line, In-line monitor, Online thickness, Line monitoring system, Precision measuring tools, Automatic, Feeding, Production, Multipoint, High speed