Film Thickness Standards

Filmetrics Thickness Standards

Filmetrics offers a wide selection of thin-film thickness standards for calibrating and verifying the accuracy of thin-film measurement systems. Filmetrics thin-film thickness standards meet the highest industry standards and can be supplied as NIST-traceable. If you don’t see the thickness standard you need for your film thickness measurements, please contact us. Our team of experts will work with you to provide the right thin-film thickness standard solution for your needs.

For more information on Filmetrics® thickness standards and other accessories, please contact our U.S. offices by calling +1 858-573-9300 (24 Hr, M-F) or contact us by e-mail.

  • TS-Focus-SiO2-4-3100 SiO2-on-Si thickness standard

    TS-Focus-SiO2-4-3100 Thickness Standard

    SiO2-on-Si thickness standard with focus area, approx 3100Å thick, 4 inch wafer.
    $961.00
  • TS-Focus-SiO2-4-10000 SiO2-on-Si thickness standard

    TS-Focus-SiO2-4-10000 Thickness Standard

    SiO2-on-Si thickness standard with focus area, approx 10000Å thick, 4 inch wafer.
    $1011.00
  • TS-FusedSilica-.125 thickness standard

    TS-FusedSilica-.125mm Thickness Standard

    Fused silica thickness standard, approx 0.125mm thick
    $206.00
  • TS-Hardcoat-4µm hardcoat-on-acrylic thickness standard

    TS-Hardcoat-4µm Thickness Standard

    Hardcoat-on-acrylic thickness standard, approx 4µm thick, 2 inch diameter.
    $206.00
  • TS-Hardcoat-Trans thickness standard

    TS-Hardcoat-Trans Thickness Standard

    Hardcoat with transparent backside for transmittance measurements.
    $206.00
  • TS-Parylene-8µm parylene-on-silicon thickness standard

    TS-Parylene-8µm Thickness Standard

    Parylene-on-silicon thickness standard, approx 8µm thick, 23mm x 23mm.
    $153.00
  • TS-Si-2-250um Si thickness standard

    TS-Si-2-250um Thickness Standard

    Si thickness standard, approx 250um thick, 2" wafer
    $137.00
  • TS-SiO2-4-7200 SiO2-on-Si thickness standard

    TS-SiO2-4-7200 Thickness Standard

    SiO2-on-Si thickness standard, approx 7200Å thick, 4 inch wafer.
    $443.00
  • TS-SiO2-4-7200-NIST SiO2-on-Si thickness standard

    TS-SiO2-4-7200-NIST Thickness Standard

    NIST-traceable TS-SiO2-4-7200.
  • TS-SiO2-6-Multi SiO2-on-Si multiple thickness standard

    TS-SiO2-6-Multi Thickness Standard

    SiO2-on-Si multiple thickness standard: 125Å, 250Å, 500Å, 1000Å, 5000Å, and 10000Å (actual thicknesses +/-10% nominal values, accurate to within 2Å), on 6 inch wafer.
    $2,394.00
  • TS-SS3-SiO2-2000 SiO2-on-Si thickness standard

    TS-SS3-SiO2-2000 Thickness Standard

    SiO2-on-Si thickness standard, approx 2000Å thick, for SS-3 stage.
    $543.00
  • TS-SS3-SiO2-8000 SiO2-on-Si thickness standard

    TS-SS3-SiO2-8000 Thickness Standard

    SiO2-on-Si thickness standard, approx 8000Å thick, for SS-3 stage.
    $543.00
  • TS-SS3-SiO2-16000 SiO2-on-Si thickness standard

    TS-SS3-SiO2-16000 Thickness Standard

    SiO2-on-Si thickness standard, approx 16000Å thick, for SS-3 stage.
    $543.00
  • TS-SiO2-2500nm-High-n-Glass thickness standard

    TS-SiO2-2500nm-High-n-Glass Thickness Standard

    SiO2-on-High-n-Glass thickness standard, approx 2500nm thick, 2" diameter
    $147.00
  • TS-SiO2-8000nm-High-n-Glass thickness standard

    TS-SiO2-8000nm-High-n-Glass Thickness Standard

    SiO2-on-High-n-Glass thickness standard, approx 8000nm thick, 2" diameter
    $147.00