Process Films

process film measurement

Filmetrics offers a full range of products for measuring thickness and index of any non-metallic semiconductor process film.

The F20 is the most affordable solution for single-spot measurements of thickness and index.

For small-spot-size thickness measurements (down to 1 micron or less), the F40 will attach to your microscope.

For affordable, automated point-by-point thickness mapping of blanket films, try the F50. The F80 maps film thickness on product wafers.

Our patented Thickness Imaging technology results in easier set up, fewer recipes, more robust pattern recognition, and much lower cost than conventional thin-film metrology tools. Both stand alone and integrated versions are available.

Contact our thin-film experts to discuss your process film application.

Filmetrics offers free trial measurements- results are typically available in 1-2 days