Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments

The Filmetrics F60-c family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and cassette-to-cassette robotic wafer handling.

The different F60-c instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths (e.g. F60-c-UV) are required to measure thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.

What's Included

Model Specifications

*Film stack dependent
Model Thickness Range* Wavelength Range
F60-c 20nm-70µm 380-1050nm
F60-c-UV 5nm-40µm 190-1100nm
F60-c-NIR 100nm-250µm 950-1700nm
F60-c-EXR 20nm-250µm 380-1700nm
F60-c-UVX 5nm-250µm 190-1700nm
F60-c-XT 0.2µm-450µm 1440-1690nm
F60-c-s980 4µm-1mm 960-1000nm
F60-c-s1310 7µm-2mm 1280-1340nm
F60-c-s1550 10µm-3mm 1520-1580nm
Thickness Range*

Additional Perks

  • Library with over 130 materials included with every system, along with access to 100s more
  • Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
  • Online "Hands On" support (internet connection required)
  • Hardware upgrade program

Common Optional Accessories