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Thickness Standards

For more information on Filmetrics accessories, please contact our U.S. offices by calling +1-858-573-9300 (Mon-Fri) or contact us by e-mail.

 
TS-SiO2-6-Multi SiO2-on-Si multiple thickness standard: 125A, 250A, 500A, 1000A, 2500A, and 10000A (all +/-10%), 6” wafer.
 
TS-Custom-NIST Creates custom NIST-traceable thickness calibration on a customer-supplied sample. Click here to request our NIST-Traceable Standards Appnote.
 
TS-Focus-Si02-4-10000 Si02-on-Si thickness standard with focus area, approx 10000A thick, 4" wafer.
 
TS-Focus-Si02-4-3100 Si02-on-Si thickness standard with focus area, approx 3100A thick, 4" wafer.
 
TS-Hardcoat Hardcoat-on-acrylic thickness standard, approx 4µm thick, 2" diameter.
 
TS-Hardcoat-Trans Hardcoat with transparent backside for transmittance measurements.
 
TS-Hardcoat-NIST NIST-traceable TS-Hardcoat.
 
TS-Parylene-3µm Parylene-on-acrylic thickness standard, approx 3µm thick, 2" diameter.
 
TS-Parylene-8µm Parylene-on-silicon thickness standard, approx 8µm thick, 23mm x 23mm
 
TS-Parylene-8µm-NIST NIST-traceable TS-Parylene-8µm.
 
TS-Si02-4-7200 SiO2-on-Si thickness standard, approx 7200A thick, 4" wafer.
 
TS-SiO2-4-7200-NIST NIST-traceable TS-SiO2-4-7200.