3D Film Thickness Mapping

Coming soon to the Profilm3D is an innovative 3D film thickness measurement option. By measuring the spectral reflectance (SR) at each pixel over the entire sampled area (the same area that the profiler function sees), the Profilm3D can measure films from 10 nm to 50 µm thick over the entire imaged surface area. The same camera is used by the profiler function, so film thickness results are easily overlayed on the measured substrate profile, underlayed below the measured surface profile, or even interlayed with the profiler data (especially useful for cases where areas that can be measured by SR and profiling are mutually exclusive, e.g., areas on a patterned integrated circuit).