Automated Thickess Mapping for Production Environments
The Filmetrics F60-t family maps film thickness and index just like our F50
products, but it also includes a number of features intended specifically for production environments. These include
automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an
industrial computer with pre-installed software, and the option to upgrade to fully robotic wafer handling.
The different F60-t instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths
(e.g. F60-t-UV) are required to measure thinner films, while longer wavelengths allow measurement of thicker, rougher, and
more opaque films.
| Model |
Thickness Range* |
Wavelength Range |
| F60-t |
20nm-50µm |
380-1050nm |
| F60-t-UV |
10nm-50µm |
200-1100nm |
| F60-t-NIR |
100nm-250µm |
950-1700nm |
| F60-t-EXR |
20nm-250µm |
380-1700nm |
| F60-t-UVX |
10nm-250µm |
200-1700nm |
| F60-t-XT |
10µm-1mm |
1590-1650nm |
*See F60 datasheet for details
|
Each F60-t model includes everything listed below. Note that a sample chuck must be ordered separately:
Common Optional Accessories
In addition, each F60-T includes these Filmetrics advantages:
- Library with over 130 materials included with every system
- Free software updates
- Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
- Online "Hands On" support (internet connection required)
- Hardware upgrade program
