Automated Film Thickness Mapping
The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks for samples as large as 300mm in diameter. Map patterns can be polar, rectangular, or linear, or you can create your own with no limit on the number of measurement points. Dozens of pre-defined map patterns are supplied.
The F50 film thickness mapping system connects to the USB port of your Windows™ computer and can be set up in minutes.
The different F50 instruments are distinguished primarily by thickness and wavelength range. The standard F50 is the most popular. Generally shorter wavelengths (e.g. F50-UV) are required measurement of thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films.
| Request Datasheet | Request Quote |
|
Each F50 model includes everything listed below. Note that a sample chuck must be ordered separately:
- Integrated Stage/Spectrometer/Light Source Unit (chuck not included)
- Fiber optic cable
- 4", 6" and 200mm Reference Wafers
- TS-Si02-4-7200 Thickness standard
- Vacuum Pump
- Hardcopy of Operator's Manual
- Connecting cables
- Spare lamp
- Tweezers
Common Optional Accessories
- NIST-traceable thickness standard
- F50 Chucks - 75mm, 100mm, 200mm, and 300mm
- F50 Small Spot option, Vis or UV
In addition, each F50 includes these Filmetrics advantages:
- Library with over 130 materials included with every system
- Free software updates
- Applications Engineers available for immediate 24-hour assistance (Mon-Fri)
- Online "Hands On" support (internet connection required)
- Hardware upgrade program
