F37

Measure film thickness in-line and in real-time at up to seven locations with the F37.

Example Layers

Almost any smooth and at-least-partially transparent films may be measured. This includes virtually any semiconducting material, including those used in thin-film photovoltaics.

Model	Thickness Range*	Wavelength Range
F37-SPEC-2	15nm-100µm	380-1050nm
F37-SPEC-2-UV	3nm-40µm	200-1100nm
F37-SPEC-2-NIR	100nm-250µm	950-1700nm
F37-SPEC-2-XT	500nm-1mm	1590-1650nm

*Film stack dependent

Benefits:

Dramatically improves productivity
Low cost-Can pay for itself in months
Accurate-Measure to better than ±1%
Fast-Measurements in seconds
Non-Invasive-Totally outside of deposition chamber
Easy to use-Intuitive Windows™ software
Turn-key system sets up in minutes

Common Optional Accessories:

Laptop computer pre-loaded with FILMeasure software

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