The Most Powerful Tool Available for Monitoring Thin-Film Deposition
Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the F30 spectral reflectance system.
Example Layers
MBE and MOCVD: Smooth and translucent, or lightly absorbing films, may be measured. This includes virtually any semiconducting material, from AIGaN to GaInAsP.
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Benefits
- Dramatically improves productivity
- Low cost - Can pay for itself in months
- Accurate - Measure to better than ±1%
- Fast-Measurements in seconds
- Non-Invasive - Totally outside of deposition chamber
- Easy to use - Intuitive Windows™ software
- Turn-key system sets up in minutes
Common Optional Accessories
- Laptop computer pre-loaded with FILMeasure software
- Lens Assemblies