The F80 maps film thickness on product wafers. Breakthrough Thickness Imaging technology results in easier set up, fewer recipes, more robust pattern recognition, and much lower cost than conventional thin-film metrology tools. Both stand alone and integrated versions are available.

The F20 is the most affordable solution for single-spot measurements of thickness and n & k.

For small-spot-size thickness measurements (down to 10 microns or less), the F40 will attach to your microscope.

For affordable automated point-by-point thickness mapping of blanket films, try the F50.