Single-Spot Measurements	Model	Thickness Range	Wavelength Range	Standard Spot Size
F2-RT	Reflectance and/or transmittance measurement Features: Compact, low-cost, non-UV systems have 40k-hour light source. * Thickness measurement capability is optional.
	F2-RT	0.015-70 µm *	380-1050 nm	6000 μm
F3-CP	Reflectance measurement of flat or curved samples Features: Compact, low-cost, non-UV systems have 40k-hour light source. * Thickness measurement capability is optional.
	F3-CP	0.2-75 µm *	380-1050 nm	100 μm
F3-CS	Hands-free reflectance measurement of flat samples Features: Compact, hands-free. * Thickness measurement capability is optional.
	F3-CS	0.2-75 µm *	380-1050 nm	100 μm
F10-AR	Reflectance measurement of large flat or curved samples Features: Handheld probe for large samples and maximum versatility. * Thickness measurement capability is optional.
	F10-AR	0.2-15 µm *	380-1050 nm	100 μm
	F10-AR-EXR	0.2-30 µm *	380-1700 nm	100 μm
	F10-AR-NIR	0.5-30 µm *	950-1700 nm	100 μm
	F10-AR-UV	0.1-15 µm *	200-1100 nm	100 μm
	F10-AR-UVX	0.1-30 µm *	200-1700 nm	100 μm
F10-ARc	Reflectance measurement of AR coatings Features: Includes color and reflectance alarms and hardcoat correction. * Thickness measurement capability is optional.
	F10-ARc	0.2-15 µm *	380-1050 nm	100 μm
F10-RT	Reflectance and/or transmittance measurement Features: Accomodates larger samples than F2-RT, has built-in video. * Thickness measurement capability is optional.
	F10-RT	0.015-70 µm *	380-1050 nm	5000 μm
	F10-RT-EXR	0.015-150 µm *	380-1700 nm	5000 μm
	F10-RT-NIR	0.1-150 µm *	950-1700 nm	5000 μm
	F10-RT-UV	0.003-40 µm *	200-1100 nm	5000 μm
	F10-RT-UVX	0.003-150 µm *	200-1700 nm	5000 μm
	F10-RTA	0.005-70 µm	380-1050 nm	5000 μm
	F10-RTA-EXR	0.005-150 µm	380-1700 nm	5000 μm
	F10-RTA-UV	0.003-40 µm	200-1100 nm	5000 μm
	F10-RTA-UVX	0.003-150 µm	200-1700 nm	5000 μm
F20	The world's best-selling thin-film measurement system Features: Our most versatile model. Includes full thickness and index measurement capabilities.
	F20	0.015-100 µm	380-1050 nm	1500 μm
	F20-EXR	0.015-250 µm	380-1700 nm	1500 μm
	F20-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F20-UV	0.001-40 µm	200-1100 nm	1500 μm
	F20-UVX	0.001-250 µm	200-1700 nm	1500 μm
	F20-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F20-XXT	10-1000 µm	1590-1650 nm	1500 μm
F40	Microscope-based thin-film measurement system Features: Attach to a microscope. Very small spot size.
	F40	0.02-20 µm	400-850 nm	1 μm
	F40-EXR	0.02-40 µm	400-1700 nm	1 μm
	F40-NIR	0.04-40 µm	950-1700 nm	1 μm
	F40-UV	0.004-40 µm	200-1100 nm	7 μm
	F40-UVX	0.004-40 µm	200-1700 nm	7 μm
F70	Color-coded Thickness Measurement System Features: Thickness range set by individual CTM lens (sold separately).
	F70	0.15-15000 µm	380-1050 nm	10 μm
	F70-NIR	100-2000 µm	950-1700 nm	10 μm

In-line Measurements	Model	Thickness Range	Wavelength Range	Standard Spot Size
F30	Complete in-line thickness monitor Features: Optional high-speed photodiode detectors.
	F30	0.015-100 µm	380-1050 nm	1500 μm
	F30-EXR	0.015-250 µm	380-1700 nm	1500 μm
	F30-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F30-UV	0.003-40 µm	200-1100 nm	1500 μm
	F30-UVX	0.003-250 µm	200-1700 nm	1500 μm
	F30-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F30-XXT	10-1000 µm	1590-1650 nm	1500 μm
F37	Modular in-line thickness monitor for up to 7 locations Features: Includes spectrometer(s), software, and 10k-hour light source.
	F37	0.015-100 µm	380-1050 nm	1500 μm
	F37-EXR	0.015-250 µm	380-1700 nm	1500 μm
	F37-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F37-UV	0.003-40 µm	200-1100 nm	1500 μm
	F37-UVX	0.003-250 µm	200-1700 nm	1500 μm
	F37-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F37-XXT	10-1000 µm	1590-1650 nm	1500 μm

Multi-Point Mapping	Model	Thickness Range	Wavelength Range	Standard Spot Size
F42	2-D Microspot Thickness Mapper Features: 2-D grid of up to a million points can be measured.
	F42	0.035-3 µm	420-800 nm	5 μm
F50	Measures thickness etc. at two points/second Features: Sample chucks (up to 300mm) sold separately.
	F50	0.02-100 µm	380-1050 nm	1500 μm
	F50-EXR	0.02-250 µm	380-1700 nm	1500 μm
	F50-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F50-UV	0.005-40 µm	200-1100 nm	1500 μm
	F50-UVX	0.005-250 µm	200-1700 nm	1500 μm
	F50-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F50-XXT	10-1000 µm	1590-1650 nm	1500 μm
F50-450	Measures thickness on 450mm wafers Features: Sample chucks (up to 450mm) sold separately.
	F50-450	0.02-100 µm	380-1050 nm	1500 μm
	F50-450-EXR	0.02-250 µm	380-1700 nm	1500 μm
	F50-450-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F50-450-UV	0.005-40 µm	200-1100 nm	1500 μm
	F50-450-UVX	0.005-250 µm	200-1700 nm	1500 μm
	F50-450-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F50-450-XXT	10-1000 µm	1590-1650 nm	1500 μm
F50-XY	Measures thickness on large panels Features: LCD panels are a common application.
	F50-XY	0.02-100 µm	380-1050 nm	1500 μm
	F50-XY-EXR	0.02-250 µm	380-1700 nm	1500 μm
	F50-XY-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F50-XY-UV	0.005-40 µm	200-1100 nm	1500 μm
	F50-XY-UVX	0.005-250 µm	200-1700 nm	1500 μm
	F50-XY-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F50-XY-XXT	10-1000 µm	1590-1650 nm	1500 μm
F60-c	Automated cassette-based film thickness mapping Features: Supports 4" to 300mm wafers.
	F60-c	0.02-100 µm	380-1050 nm	1500 μm
	F60-c-EXR	0.02-250 µm	380-1700 nm	1500 μm
	F60-c-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F60-c-UV	0.005-40 µm	200-1100 nm	1500 μm
	F60-c-UVX	0.005-250 µm	200-1700 nm	1500 μm
	F60-c-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F60-c-XXT	10-1000 µm	1590-1650 nm	1500 μm
F60-t	Production-oriented film thickness mapping Features: Includes notch-finding, on-board baselining, and safety interlock.
	F60-t	0.02-100 µm	380-1050 nm	1500 μm
	F60-t-EXR	0.02-250 µm	380-1700 nm	1500 μm
	F60-t-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F60-t-UV	0.005-40 µm	200-1100 nm	1500 μm
	F60-t-UVX	0.005-250 µm	200-1700 nm	1500 μm
	F60-t-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F60-t-XXT	10-1000 µm	1590-1650 nm	1500 μm
F80-c	Automated cassette-based patterned wafer film thickness measurement Features: Measure patterned wafers faster than one point per second.
	F80-c	0.015-5 µm	400-800 nm	15 μm
F80-t	Tabletop patterned wafer film thickness measurement Features: Measure patterned wafers faster than one point per second.
	F80-t	0.015-5 µm	400-800 nm	15 μm

F2-RT

F3-CP

F3-CS

F10-AR

F10-ARc

F10-RT

F20

F40

F70

F30

F37

F42

F50

F50-450

F50-XY

F60-c

F60-t

F80-c

F80-t

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