MEMS, Flip-Chip, SOI, and Other Thick Silicon Layers

Measuring thick layers of silicon presents a unique challenge because of the high optical thickness often encountered (optical thickness = physical thickness * index, where index is about 3.5 for silicon), and because silicon more than a few microns thick is opaque in the visible wavelengths. However, Filmetrics has developed two systems that overcome these challenges. For silicon layers up to 100 microns we recommend the F20-NIR, while the F20-XT can measure silicon layers up to 160 microns thick.