Turns Your Microscope into a Thin-Film Thickness Measuring Tool

Thickness is measured quickly and easily with Filmetrics advanced spectrometry systems. Spectral analysis of reflections from the top and bottom of the thin film provides thickness in seconds.

For measurements on patterned surfaces and other applications that require a spot size as small as 10 microns, just add the model F40 to your microscope. For common microscopes the F40 is a simple bolt-on attachment, complete with a c-mount for a CCD camera.

For complete specifications
Download the F40 datasheet (303 kB)

Example Layers
Virtually any smooth, translucent, or lightly absorbing film may be measured. This includes:
SiO2
SiNX
DLC
Photoresist
Polymer layers
Polyimide
Polysilicon
Amorphous Silicon

Example Substrates
All that is required in most cases is a smooth, reflective substrate. Examples include:
Silicon
Glass
Aluminum
GaAs
Steel
Polycarbonate
Polymer films


The F40 Microscope-based
Thickness Measurement System


APPLICATIONS:

Semiconductor Fabrication
• Photoresist
• Oxides
• Nitrides

Liquid Crystal Displays
• Cell Gaps
• Polyimides
• ITO

Optical Coatings
• Hardness Coatings
• Anti-Reflection Coatings
• Filters