An Advanced Thin-Film Measurement System at an Affordable Price

The Filmetrics F20-XT is optimized to measure thick films. Measuring films greater than 50 microns presents a unique challenge because of the high optical thickness often encountered (optical thickness = physical thickness x index). Some films, such as silicon, also become opaque in the visible wavelengths when thicker than a few microns.

To overcome these challenges, the F20-XT, based on the F20-NIR platform, contains a 512-element InGaAs spectrometer. Covering a wavelength range of 1400-1650 nm, this system maintains a 0.5 nm wavelength resolution in the NIR region, enabling it to detect thicker films more effectively than other optical-based system.

Download the F20-XT datasheet (155 kB)

SPECIFICATIONS:
Thickness range: 0.2 to 450 microns (low index films) 0.1 to 160 microns (Si & other semiconductors)
Spot Size: Adjustable 200 µm to 1 cm
Sample Size: From 1 mm to 300 mm diameter and up
Data logging: Automatic with reset
Data exporting: Standard Windows methods
Remote communication: DDE ready
Accuracy*: Better than 0.4%
Precision*: 0.001 µm
Stability*: 0.001 µm
Spectrometer Type: 512-element InGaAs array
Light Source: Regulated Tungsten-Halogen
Power Requirements: 100-240 VAC, 50-60 Hz, 0.3-0.1 A
Computer Requirements: Windows™ 98 or later with USB port

* Typical values in spectrum-matching mode. Layer stack dependent.